C. Dittberner

Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays

P. Loosen, T. Taubner, Hyun-su Kim, 2013 .

Broadband transmission masks, gratings and filters for extreme ultraviolet and soft X-ray lithography

Peter Loosen, Larissa Juschkin, Sascha Brose, 2012 .