Michael J. Scaggs

Novel results of laser precision microfabrication with excimer lasers and solid state lasers

Uwe Stamm, Michael Fiebig, Sergei V. Govorkov, 2000, International Symposium on Laser Precision Microfabrication.

M-squared measurement repeatability: The best metric in the certainty of the measurement

Michael J. Scaggs, Gilbert Haas, 2017 .

M-squared measurement with improved repeatability for CW to single pulse lasers

Michael J. Scaggs, Gilbert Haas, 2018, LASE.

New dimensions of micromachining with 157-nm laser light

Michael J. Scaggs, Dirk Basting, Rainer Paetzel, 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Novel method to mitigate ghost images in laser beam diagnostic and laser vision systems

Michael J. Scaggs, Gilbert Haas, 2019, LASE.

Microstructuring with 157-nm laser light

Eric E. Mayer, Michael J. Scaggs, Dirk Basting, 1999, Photonics West.