Paul-Chang Lin

Crown Defect Reduction and Cp Yield Improvement for High Voltage Power Management IC Product

Peng Sun, Cheng Xing, Paul-Chang Lin, 2010 .

TSV CMP Process Development and Pitting Defect Reduction

Yuchun Wang, Jinhai Xu, Zhiyong Ma, 2012 .

Study of Inhibition effects on Copper CMP Slurry Performance

Jian Zhang, Zhiyong Ma, Paul-Chang Lin, 2011 .