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In situ monitoring of Raman scattering and photoluminescence from silicon surfaces in HF aqueous solutions

B. Ren, Z. Tian, J. Xie, 1998 .

Three-dimensional Electrochemical Micromachining on Metal and Semiconductor by Confined Etchant Layer Technique (CELT)

Li Zhang, Li Zhang, Jing-Xiao Tang, 2007, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

Studies on silicon etching using the confined etchant layer technique

Zhao-Wu Tian, Lie Xie, Bing-Wei Mao, 1998 .

Improvement of silicon etching resolution using the confined etchant layer technique

Zhao-Wu Tian, Zhaoxiong Xie, Bing-Wei Mao, 1997 .