S. Inoue

Thermal resonant zeolite-based gas sensor

S. Mintova, M. Denoual, Y. Mita, 2017 .

Characterization of zeolite-trench-embedded microcantilevers with CMOS strain gauge for integrated gas sensor applications

Yoshio Mita, Matthieu Denoual, Agnes Tixier-Mita, 2016 .

Self-identification algorithm for zeolite-based thermal capacity gas sensor

S. Inoue, Y. Mita, M. Denoual, 2018 .

Self-identification algorithm for zeolite-based thermal capacity gas sensor

M. Denoual, M. Harnois, J. Grand, 2018, Microsystem Technologies.

Zeolite-based thermal mass gas sensor with self-identification algorithm

S. Inoue, Y. Mita, M. Denoual, 2017, 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP).

Opportunities of CMOS-MEMS integration through LSI foundry and open facility

Yoshio Mita, Yuki Okamoto, Kentaro Yamada, 2017 .