J. Amirola

Micromachined silicon microstructures for gas sensors

M. C. Horrillo, F. J. Gutierrez, L. Castañer, 2005, Conference on Electron Devices, 2005 Spanish.

Design fabrication and test of micromachined-silicon capacitive gas sensors with integrated readout

Jorge Amirola, Angel Rodiguez, Luis Castaner, 2003, SPIE Microtechnologies.

Micromachined silicon microcantilevers for gas sensing applications with capacitive read-out

José Pedro Santos, M. C. Horrillo, Angel Rodriguez, 2005 .

Electromechanically coupled feedback loops for microsystems. Application to volatile organic compounds (VOC) sensors

M. C. Horrillo, I. Sayago, M.C. Horrillo, 2004, Proceedings of IEEE Sensors, 2004..