S. Ioku

Seedlayer-less gold electroplating on silicon surface for MEMS applications

K. Maenaka, T. Fujita, Y. Takayama, 2007 .

Design consideration of micro gyroscope stabilized for acceleration

K. Maenaka, T. Fujita, Y. Takayama, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

Design, fabrication and operation of MEMS gimbal gyroscope☆

Takayuki Fujita, Kazusuke Maenaka, Yoichiro Takayama, 2005 .

Study of Ni-W alloy as a MEMS Material

Takayuki Fujita, Kazusuke Maenaka, Hidehiro Ikeda, 1999 .