P. Naga Sayanu

Design, fabrication, characterization of micromachined capacitive shunt switches with low actuation voltages and low temperature packaging

S. Lakshmi, K. Natarajan, P. Manohar, 2017 .

Design, fabrication, characterization of micromachined capacitive shunt switches with low actuation voltages and low temperature packaging

S. Lakshmi, K. Natarajan, P. Manohar, 2017, Microsystem Technologies.