E. Quevy

Tapping-mode HF nanometric lateral gap resonators: experimental and theory

E. Quevy, B. Legrand, D. Collard, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

IF MEMS filters for mobile communication

Denis Flandre, E. Quevy, Andreas Kaiser, 2001, ETFA 2001. 8th International Conference on Emerging Technologies and Factory Automation. Proceedings (Cat. No.01TH8597).

MEMS for mobile communication

Denis Flandre, E. Quevy, Dominique Collard, 2001 .

Large stroke actuation of continuous membrane for adaptive optics by 3D self-assembled microplates

E. Quevy, Dominique Collard, Lionel Buchaillot, 2002 .

3-D self-assembling and actuation of electrostatic microstructures

E. Quevy, L. Buchaillot, Dominique Collard, 2001 .

Ultimate technology for micromachining of nanometric gap HF micromechnical resonators

E. Quevy, B. Legrand, D. Collard, 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

3D self-assembling and actuation of electrostatic micro-mirrors

E. Quevy, D. Collard, L. Buchaillot, 2000, 30th European Solid-State Device Research Conference.

Ge-blade damascene process for post-CMOS integration of nano-mechanical resonators

E. Quevy, Tsu-Jae King, R. Howe, 2004, IEEE Electron Device Letters.