Koji Nagata
发表
Tatsuo Nishizawa,
Masahiro Furukawa,
Koji Nagata,
2017
.
Koji Nagata,
2010
.
Koji Nagata,
2004
.
Akira Fujii,
Hajime Hayakawa,
Koji Nagata,
2001,
SPIE Advanced Lithography.
Tetsuya Mizumoto,
Toshihiro Yamane,
Atsuhiro Nishikata,
2009
.
Hiroyoshi Ando,
Teruo Iwasaki,
Norio Saitou,
1997,
Advanced Lithography.
Tetsuro Atsumi,
Koji Nagata,
Kozo Kawano,
2003
.
Hiroshi Tsuji,
Norio Saitou,
Koji Nagata,
1997,
Photomask and Next Generation Lithography Mask Technology.
Yasuhiro Akiyama,
Yasuyuki Kudo,
Hiroyuki Nitta,
2011
.