N. Pic

Monitoring of organic contamination in the ambient air of microelectronic clean room by proton-transfer reaction/time-of-flight/mass spectrometry (PTR–ToF–MS)

S. Tlili, S. Gligorovski, H. Wortham, 2015 .

In cleanroom, sub-ppb real-time monitoring of volatile organic compounds using proton-transfer reaction/time of flight/mass spectrometry

Nicolas Pic, Henri Wortham, Sasho Gligorovski, 2014, Advanced Lithography.

Defectivity decrease in the photolithography process by AMC level reduction through implementation of novel filtration and monitoring solutions

Nicolas Pic, Christophe Martin, Michel Vitalis, 2010, Advanced Lithography.

Molybdenum Contamination in Silicon: Detection and Impact on Device Performances

A. Riva, D. Coulon, M. Polignano, 2009 .

Contamination induced risk reduction through improved control plan implementation

P. Maillot, M. Le Gall, N. Pic, 2009, 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.

Influence of Cobalt Contamination in the Measurement of Diffusion Length of Silicon Wafers

M. Polignano, A. Danel, S. Rey, 2003 .