Shuzo Fujimura

Pulse-modulated infrared-laser interferometric thermometry for Si substrate temperature measurement

Hiroshi Yano, Jun Kikuchi, Ryo Kurosaki, 1994, Advanced Lithography.

A method of manufacturing an integrated semiconductor circuit

Shuzo Fujimura, Takahiro Ito, Jun-Ichi Konno, 1991 .

Native oxide removal on Si surface by NF3-added hydrogen plasma downstream treatment

Hiroshi Yano, Shuzo Fujimura, Jun Kikuchi, 1994, Other Conferences.

Effects of H2O on Atomic Hydrogen Generation in Hydrogen Plasma

Hiroshi Yano, Shuzo Fujimura, Masafumi Suzuki, 1993, Other Conferences.

In-situ Si wafer temperature measuring using pulse-modulated infrared laser interferometric thermometry for CVD film deposition

Jun Kikuchi, Ryo Kurosaki, Shuzo Fujimura, 1995, Advanced Lithography.

Protection of aluminum alloy films from after corrosion using H2O down stream ashing

T. Takada, Shuzo Fujimura, Jun-Ichi Konno, 1992, Other Conferences.

Ashing of Ion-Implanted Resist Layer

Hiroshi Yano, Shuzo Fujimura, Jun-Ichi Konno, 1989 .