Ingo Behrens

Micromachining of silicon carbide on silicon fabricated by low-pressure chemical vapour deposition

A. Bakin, A. Schlachetzki, E. Peiner, 2002 .

Growth of InP Layers on Nanometer-Scale Patterned Si Substrates

A. Bakin, H. Wehmann, A. Schlachetzki, 2003 .

Mechanical spectroscopy of thin layers of PPV polymer on Si substrates

S. Schrader, A. Schlachetzki, E. Peiner, 2004 .

Elastic and anelastic properties of Fe-doped InP films on silicon cantilevers

J. Rösler, A. Bakin, H. Wehmann, 2002 .

Piezoresistive cantilever as portable micro force calibration standard

Lutz Doering, Erwin Peiner, Ingo Behrens, 2003 .