Robert Steffen

Bias-free measurement of LER/LWR with low damage by CD-SEM

Atsuko Yamaguchi, Robert Steffen, Hiroki Kawada, 2006, SPIE Advanced Lithography.

From speculation to specification: a discussion on how to define the tolerance of LER/LWR and its measurement methodology

Atsuko Yamaguchi, Robert Steffen, Hiroki Kawada, 2006, SPIE Advanced Lithography.

Modeling Energy Generation by Grid Connected Photovoltaic Systems in the United States

Robert Steffen, Yong Han Ahn, Sung Joon Suk, 2013 .

Life Cycle Assessment Applied to Green Building Certification in South Korea

Robert Steffen, Sungho Tae, George Ford, 2015 .

Single-shot method for bias-free LER/LWR evaluation with little damage

Atsuko Yamaguchi, Robert Steffen, Hiroki Kawada, 2007 .

DESIGN ISSUES AND CONSTRUCTIBILITY OF A CFRD GRID REINFORCED BRIDGE DECK

Robert Steffen, Charles Goodspeed, Martha Bowman, 2003 .