S. Daniels

发表

Investigation of atomic oxygen density in a capacitively coupled O2/SF6 discharge using two-photon absorption laser-induced fluorescence spectroscopy and a Langmuir probe

P. Swift, M. Turner, S. Kechkar, 2013 .

Interaction of SF6 and O2 plasma with porous poly phenyl methyl silsesquioxane low-κ films

P. McNally, K. Rajani, A. Heise, 2015 .

Investigation of O2 and SF6 plasma interactions on thermally stable damage resistant poly phenyl-methyl silsesquioxane low-k films

K. Rajani, A. Heise, A. McCoy, 2014 .

Electron Density and Optical Emission Measurements of SF6/O2 Plasmas for Silicon Etch Processes

M. Morshed, S. Daniels, 2012 .

Use of particle-in-cell simulations to improve the actinometry technique for determination of absolute atomic oxygen density

M. Turner, C. Gaman, S. Kechkar, 2013 .

Effect of Positive Photoresist on Silicon Etching by Reactive Ion Etching Process

M. Morshed, S. Daniels, 2010, IEEE Transactions on Plasma Science.

Investigation of the electron kinetics in O2 capacitively coupled plasma with the use of a Langmuir probe

P. Swift, M. Turner, S. Daniels, 2017 .

Comparison of pilot and industrial scale atmospheric pressure glow discharge systems including a novel electro-acoustic technique for process monitoring

Denis P. Dowling, Gerry Byrne, Stephen R. Daniels, 2010 .

Evaluation of real-time non-invasive diagnostic tools for the monitoring of a pilot scale atmospheric pressure plasma system

B. Twomey, D. Dowling, A. Hynes, 2009 .

Non-invasive VHF monitoring of low-temperature atmospheric pressure plasma

J. Walsh, V. Law, T. Gans, 2010 .

Plasma Treatment of Natural Jute Fibre by RIE 80 plus Plasma Tool

M. Morshed, M. M. Alam, S. Daniels, 2010 .

Formation of a Double Layer in Electronegative ${\rm O}_{2}$ Plasma

D. Gahan, M. Hopkins, S. Sharma, 2014, IEEE Transactions on Plasma Science.

Ion energy distribution measurements in rf and pulsed dc plasma discharges

S. Daniels, Y. Pei, D. Gahan, 2012 .

Two-photon absorption laser induced fluorescence measurement of atomic oxygen density in an atmospheric pressure air plasma jet

M. Turner, C. Gaman, G. Gogna, 2016 .

Characterization of an asymmetric parallel plate radio-frequency discharge using a retarding field energy analyzer

S. Daniels, D. Sullivan, D. Gahan, 2012 .

Refractive elements produced in photopolymer layers

John T. Sheridan, Michael R. Gleeson, John V. Kelly, 2004, SPIE Optics + Photonics.