Shigeo Yasuhara
发表
S. Kadomura,
S. Samukawa,
T. Kubota,
2009
.
S. Kadomura,
S. Samukawa,
H. Yano,
2009
.
S. Kadomura,
S. Samukawa,
H. Yano,
2010
.
S. Kaneko,
Manabu Yasui,
M. Kurouchi,
2022,
Scientific Reports.
T. Tokumasu,
M. Zaitsu,
Naoya Uene,
2020,
2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD).
S. Samukawa,
Toru Sasaki,
A. Wada,
2012
.
S. Kaneko,
Manabu Yasui,
S. Takagi,
2013
.
T. Doi,
O. Nakatsuka,
S. Zaima,
2017
.
A. Hotta,
K. Kodama,
Masaki Nakaya,
2016
.
T. Tokumasu,
M. Zaitsu,
Naoya Uene,
2023,
Computational Materials Science.
Tetsuhide Shimizu,
M. Yang,
Shigeo Yasuhara,
2015
.
Tomoki Maeda,
Atsushi Hotta,
A. Hotta,
2018,
Surface and Coatings Technology.
Deposition of Boron Nitride Films by Filament-Assisted CVD Using Tris(Bimethylamino)Borane Precursor
Tetsuhide Shimizu,
M. Yang,
Shigeo Yasuhara,
2015
.
Tetsuhide Shimizu,
M. Yang,
Shigeo Yasuhara,
2015
.
Tetsuhide Shimizu,
M. Yang,
Shigeo Yasuhara,
2014
.
S. Kaneko,
M. Kurouchi,
M. Yoshimoto,
2018,
Japanese Journal of Applied Physics.
S. Kaneko,
M. Kurouchi,
M. Yoshimoto,
2022,
Applied Surface Science.
S. Kaneko,
M. Yoshimoto,
C. Kato,
2017,
ACS omega.
T. Tokumasu,
M. Zaitsu,
Naoya Uene,
2022,
Computational Materials Science.