M. Fujitani

Grinding and chemical mechanical polishing process for micropore x-ray optics fabricated with deep reactive ion etching.

K. Mitsuda, T. Ohashi, Y. Ezoe, 2019, Applied optics.

Evaluation of alignment error of micropore X-ray optics caused by hot plastic deformation

K. Mitsuda, T. Ohashi, Y. Ezoe, 2018 .

X-ray evaluation of high-verticality sidewalls fabricated by deep reactive ion etching

K. Mitsuda, T. Ohashi, Y. Ezoe, 2017 .

Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition

K. Mitsuda, Y. Ezoe, K. Ishikawa, 2020, Applied Physics Express.

Pt thermal atomic layer deposition for silicon x-ray micropore optics.

Yuichiro Ezoe, Kazuhisa Mitsuda, Kumi Ishikawa, 2018, Applied optics.