Masaru Terada

Evaluation of alignment error of micropore X-ray optics caused by hot plastic deformation

K. Mitsuda, T. Ohashi, Y. Ezoe, 2018 .

X-ray evaluation of high-verticality sidewalls fabricated by deep reactive ion etching

K. Mitsuda, T. Ohashi, Y. Ezoe, 2017 .

First X-ray imaging with a micromachined Wolter type-I telescope

K. Mitsuda, T. Ohashi, Y. Ezoe, 2017 .

Pt thermal atomic layer deposition for silicon x-ray micropore optics.

Yuichiro Ezoe, Kazuhisa Mitsuda, Kumi Ishikawa, 2018, Applied optics.