Shu Qin

Fabrication of low dielectric constant materials for ULSI multilevel interconnection by plasma ion implantation

Chung Chan, P. Chu, Shu Qin, 1998, IEEE Electron Device Letters.

Hydrogenation of polycrystalline silicon thin film transistors by plasma ion implantation

Chung Chan, Tsu-Jae King, J. Bernstein, 1995, IEEE Electron Device Letters.

The effect of high-dose nitrogen plasma immersion ion implantation on silicone surfaces

Chung Chan, Shu Qin, Paul K. Chu, 2000 .

Energy distribution of boron ions during plasma immersion ion implantation

Chung Chan, Shu Qin, N E McGruer, 1992 .