Kazuo Sato

发表

1.07 – Wet Etching

M. Shikida, Kazuo Sato, 2008 .

Simple to Complex Structures Using Wet Bulk Micromachining

P. Pal, Kazuo Sato, 2017 .

Tensile Test of Bulk- and Surface-Micromachined 0.1-νm Thick Silicon Film using Electrostatic Force Grip System

M. Shikida, T. Tsuchiya, J. Sakata, 2001 .

Mechanical Properties of 0.1 Micron Thick Simox Film Measured Using on-Chip Tensile Test System

M. Shikida, T. Tsuchiya, J. Amano, 2001 .

Adsorbed surfactant thickness on: A Si wafer dominating etching properties of TMAH solution

M. Shikida, H. Hida, M. Gosálvez, 2009, 2009 International Symposium on Micro-NanoMechatronics and Human Science.

A New Explanation of Mask-corner Undercut in Anisotropic Silicon Etching: Saddle Point in Etching Rate Diagram

M. Shikida, H. Sasaki, Ken-ichi Nanbara, 2001 .

Droplet introduction into a pen-shaped portable reaction system by gravity and interfacial forces

M. Shikida, M. Okochi, H. Honda, 2011 .

Systematic study of the etching characteristics of Si{111} in modified TMAH

A. Pandey, Y. Xing, P. Pal, 2020, Micro & Nano Letters.

The construction of orientation-dependent crystal growth and etch rate functions II: Application to wet chemical etching of silicon in potassium hydroxide

A. J. Nijdam, J. Gardeniers, M. Elwenspoek, 2000 .

Mechanical strengthening of Si cantilevers by chemical wet etching

M. Shikida, Kayo Hamaguchi, Kazuo Sato, 2012, Microsystem Technologies.

Increase in mechanical strength by scalloping removal

M. Shikida, H. Hida, Kayo Hamaguchi, 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

Micro tensile-test system fabricated on a single crystal silicon chip

M. Shikida, K. Sato, T. Yoshioka, 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

Fabrication of a wearable fabric tactile sensor produced by artificial hollow fiber

M. Shikida, Y. Hasegawa, D. Ogura, 2008 .

Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems

M. Shikida, T. Phan, H. Hida, 2013 .

In-Situ Surface Observations of Fracture in TiN Thin Films under Tensile Stress by AFM

S. Kotake, D. Morino, Takamasa Suzuki, 2003 .

Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH

M. Shikida, Kazuo Sato, M. Gosálvez, 2009 .

Effect of Cu impurities on wet etching of Si(110): formation of trapezoidal hillocks

Kazuo Sato, R. Nieminen, A. Foster, 2008 .

Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching

Miguel A. Gosálvez, Yan Xing, Prem Pal, 2015 .

Roughening of single-crystal silicon surface etched by KOH water solution

M. Shikida, Kazuo Sato, Takashi Yamashiro, 1999 .

Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration

Yasuroh Iriye, Mitsuhiro Shikida, Kazuo Asaumi, 1998 .

A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching

P. Pal, Kazuo Sato, 2015 .

Differences in anisotropic etching properties of KOH and TMAH solutions

M. Shikida, Kazuo Sato, D. Uchikawa, 2000 .

High speed silicon wet anisotropic etching for applications in bulk micromachining: a review

A. Pandey, P. Pal, Hiroshi Tanaka, 2021 .

A Table-Shaped Tactile Sensor for Detecting Triaxial Force on the Basis of Strain Distribution

Kazuo Sato, Mitsuhiro Shikida, Min-Gyu Kim, 2013, Sensors.

Polymer Based Slim Tactile Sensor: Optimal Design and New Fabrication Method

Kazuo Sato, Jeong-Il Lee, Kazuo Sato, 2011 .

Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip

Mitsuhiro Shikida, Taeko Ando, Tetsuo Yoshioka, 2000 .

Using wettability and interfacial tension to handle droplets of magnetic beads in a micro-chemical-analysis system

Mitsuhiro Shikida, M. Shikida, Kazuo Sato, 2006 .

Micro-morphology of single crystalline silicon surfaces during anisotropic wet chemical etching in KOH: velocity source forests

A. J. Nijdam, M. Shikida, Kazuo Sato, 2001 .

Surface morphology of anisotropically etched single-crystal silicon

M. Shikida, Kazuo Sato, D. Uchikawa, 2000 .

First-principles calculations of Cu adsorption on an H-terminated Si surface

R. Nieminen, A. Foster, T. Hynninen, 2007 .

Mechanical properties of a micron-sized SCS film in a high-temperature environment

Mitsuhiro Shikida, Taeko Ando, M. Shikida, 2006 .

Fabrication techniques of convex corners in a (1 0 0)-silicon wafer using bulk micromachining: a review

Kazuo Sato, P. Pal, S. Chandra, 2007 .

Charactarization of Mechanical Properties of MEMS Materials

T. Yoshioka, Kazuo Sato, 1999 .

Wavelet characterization of the submicron surface roughness of anisotropically etched silicon

Z. Moktadir, K. Sato, Kazuo Sato, 2000 .

Effect of temperature on fracture toughness in a single-crystal-silicon film and transition in its fracture mode

Mitsuhiro Shikida, Taeko Ando, M. Shikida, 2007 .

Electrostatically driven gas valve with high conductance

M. Shikida, M. Shikida, Y. Kawamura, 1994 .

Anisotropic etching in low-concentration KOH: effects of surfactant concentration

Kazuo Sato, Y. Xing, P. Pal, 2015 .

Improvement in smoothness of anisotropically etched silicon surfaces: Effects of surfactant and TMAH concentrations

Mitsuhiro Shikida, Di Cheng, M. Shikida, 2006 .

Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution

M. Shikida, Kazuo Sato, S. Yamashita, 2004 .

Fabrication of a bubble-driven arrayed actuator for a tactile display

M. Shikida, Tsubasa Imamura, K. Sato, 2008 .

Advanced Surfactant-Modified Wet Anisotropic Etching

B. Tang, Kazuo Sato, 2012 .

Fabrication of densely arrayed micro-needles with flow channels by mechanical dicing and anisotropic wet etching

Kazuo Sato, Mitsuhiro Shikida, Takehiko Hasada, 2006 .

Active-head slider with piezoelectric actuator using shear-mode deformation

Kazutaka Sato, Kazuo Sato, Shigeo Nakamura, 2009 .

Effect of Potassium Ion on Anisotropy of TMAH (特集:立体的微細加工)

Kazuo Sato, O. Tabata, T. Yoshioka, 2000 .

Thermal characterization of micro heater arrays on a polyimide film substrate for fingerprint sensing applications

M. Shikida, M. Shikida, Kazuo Sato, 2005 .

Measurement for fracture toughness of single crystal silicon film with tensile test

Mitsuhiro Shikida, Taeko Ando, T. Kasai, 2005 .

Experimental and theoretical study of an on-wall in-tube flexible thermal sensor

Yasuroh Iriye, Z. Y. Tan, M. Shikida, 2007 .

Study on the enamel thickness of the anterior teeth of the Japanese. Preparation for the laminate veneer technique.

Yuichiro Ajima, K. Umehara, Kazuo Sato, 1990 .

Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes

Prem Pal, P. Pal, Kazuo Sato, 2010, DTIP 2010.

Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS

A. Pandey, Y. Xing, P. Pal, 2016 .

Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of silicon in alkaline etchants containing additives

Miguel A. Gosálvez, Hui Zhang, Yan Xing, 2015 .

Silicon Micromachining Based on Surfactant-Added Tetramethyl Ammonium Hydroxide: Etching Mechanism and Advanced Applications

Kazuo Sato, M. Gosálvez, P. Pal, 2010 .

Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions

Bin Tang, Prem Pal, M. Gosálvez, 2010 .

High speed silicon wet anisotropic etching for applications in bulk micromachining: a review

P. Pal, Hiroshi Tanaka, A. V. N. Rao, 2021, Micro and Nano Systems Letters.

Anisotropic etching on Si{1 1 0}: experiment and simulation for the formation of microstructures with convex corners

Miguel A. Gosálvez, Yan Xing, Prem Pal, 2014 .

Aging Effects of KOH+NH2OH Solution on the Etching Characteristics of Silicon

Kazuo Sato, A. Pandey, P. Pal, 2019, ECS Journal of Solid State Science and Technology.

Complex three-dimensional structures in Si{1 0 0} using wet bulk micromachining

Prem Pal, P. Pal, Kazuo Sato, 2009 .

A model explaining mask-corner undercut phenomena in anisotropic silicon etching: a saddle point in the etching-rate diagram

Mitsuhiro Shikida, Ken-ichi Nanbara, Tohru Koizumi, 2002 .

Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH

Mitsuhiro Shikida, Prem Pal, M. Shikida, 2009 .

Various shapes of silicon freestanding microfluidic channels and microstructures in one-step lithography

Prem Pal, P. Pal, Kazuo Sato, 2009 .

Etching Mechanism Behind the High-Speed Etching of Silicon in NH2OH-added Alkaline Solutions

A. Pandey, P. Pal, Hiroshi Tanaka, 2020 .

Smoothness Control of Wet Etched Si{100} Surfaces in TMAH+Triton

Bin Tang, Prem Pal, P. Pal, 2014 .

Formation of Silicon Nano Tips in Surfactant-Modified Wet Anisotropic Etching

Bin Tang, B. Tang, Kazuo Sato, 2011 .

Forty-Five Degree Micromirror Fabrication Using Silicon Anisotropic Etching with Surfactant-Added Tetramethylammonium Hydroxide Solution

Nishimura Makoto, Kazuo Sato, M. Nishimura, 2010 .

Silicon Wet Bulk Micromachining for MEMS

P. Pal, Kazuo Sato, 2016 .

Fast Si (100) etching with a smooth surface near the boiling temperature in surfactant-modified tetramethylammonium hydroxide solutions

B. Tang, De Zhang, Kazuo Sato, 2014 .

Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants

Mitsuhiro Shikida, Prem Pal, M. Shikida, 2007 .

Micromorphology of single crystalline silicon surfaces during anisotropic wet chemical etching in KOH and TMAH

Mitsuhiro Shikida, E. van Veenendaal, M. Shikida, 2001 .

Suspended Si Microstructures Over Controlled Depth Micromachined Cavities for MEMS Based Sensing Devices

P. Pal, Kazuo Sato, 2009 .

Characterization of anisotropic wet etching properties of single crystal silicon: Effects of ppb-level of Cu and Pb in KOH solution

M. Shikida, Kazuo Sato, Hiroshi Tanaka, 2006 .

Change in orientation-dependent etching properties of single-crystal silicon caused by a surfactant added to TMAH solution

M. Shikida, D. Uchikawa, Kazuo Sato, 2001 .

Structural design of a polymer-based tactile sensor with a table-shaped sensing pad

Mitsuhiro Shikida, Kazuo Sato, Hyunjin Shin, 2014 .

Transparent touch panel with conductive liquid channel structure

Mitsuhiro Shikida, M. Shikida, G. Kita, 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

Microfabricated 3D flexible tactile sensor with table-shaped structure for intelligent robot fingers

Mitsuhiro Shikida, Hirotaka Hida, M. Shikida, 2010, 2010 International Symposium on Micro-NanoMechatronics and Human Science.

Large-sized fabric tactile sensors for detecting contacted objects

Mitsuhiro Shikida, G. Kita, Y. Suzuki, 2010 .

Fabric tactile sensor composed of ball-shaped umbonal fibre for detecting normal and lateral force

M. Shikida, Kazuo Sato, G. Kita, 2010 .

Amicromachined active tactile sensor for hardness detection

M. Shikida, K. Itoigawa, Y. Hasegawa, 2004 .

Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer

M. Shikida, Jeong Il Lee, K. Sato, 2015 .

An electrostatically actuated gas valve with an S-shaped film element

M. Shikida, Kazuo Sato, M Shikida, 1994 .

Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si

Kazuo Sato, R. Nieminen, A. Foster, 2008, 0807.1611.

Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip

M. Shikida, Kazuo Sato, T. Yoshioka, 1998 .

Fabrication of a hollow needle structure by dicing, wet etching and metal deposition

Mitsuhiro Shikida, Takehiko Hasada, M. Shikida, 2006 .

Development of Si DRIE process allowing simultaneous etching from narrow and wide mask openings

Y. Takeuchi, J. Ohara, Kazuo Sato, 2011 .

A force transmission system based on a tulip-shaped electrostatic clutch for haptic display devices

Mitsuhiro Shikida, Hikaru Sasaki, Kazuo Sato, 2006 .

Micromechanical characterization of electroplated permalloy films for MEMS

M. Shikida, G. Ding, Xueping Li, 2007 .

Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films

K. Sato, Y. Saotome, K. Takashima, 2005, Journal of Microelectromechanical Systems.

Octree-search Kinetic Monte Carlo

Miguel A. Gosálvez, Kazuo Sato, Risto M. Nieminen, 2010 .

Flexible flow sensor for large-scale air-conditioning network systems

Kazuo Sato, Mitsuhiro Shikida, Satoshi Iwai, 2012 .

A palmtop-sized rotary-drive-type biochemical analysis system by magnetic bead handling

Mitsuhiro Shikida, Mina Okochi, Hiroyuki Honda, 2008 .

Development of an enzymatic reaction device using magnetic bead-cluster handling

Hiroshi Ito, Mitsuhiro Shikida, M. Shikida, 2006 .

Surfactant Adsorption on Single-Crystal Silicon Surfaces in TMAH Solution: Orientation-Dependent Adsorption Detected by In Situ Infrared Spectroscopy

K. Sato, M. Niwano, H. Hida, 2009, Journal of Microelectromechanical Systems.

Octree-based, GPU implementation of a continuous cellular automaton for the simulation of complex, evolving surfaces

Kazuo Sato, Rafael Gadea Gironés, Joaquín Cerdá, 2011, Comput. Phys. Commun..

Fluctuations During Anisotropic Etching: Local Recalibration and Application to Si{110}

N. Ferrando, Y. Xing, M. Gosálvez, 2016, Journal of Microelectromechanical Systems.

Discrete and continuous cellular automata for the simulation of propagating surfaces

Miguel A. Gosálvez, Risto M. Nieminen, Yan Xing, 2009 .

Surface roughness of single-crystal silicon etched by TMAH solution

M. Shikida, Kazuo Sato, T. Masuda, 2001 .

Development of an orientation-dependent anisotropic etching simulation system MICROCAD

M. Shikida, Kazuo Sato, K. Asaumi, 2000 .

Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

M. Shikida, K. Sato, K. Asaumi, 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

Torsion Fatigue Testing of Polycrystalline Silicon Cross-Microbridge Structures

Hong Hocheng, Kazuo Sato, H. Hocheng, 2011 .

Tensile-mode fatigue testing of silicon films as structural materials for MEMS

Mitsuhiro Shikida, Taeko Ando, M. Shikida, 2001 .

A MEMS flow sensor applied in a variable-air-volume unit in a building air-conditioning system

Kazuo Sato, Mitsuhiro Shikida, Kazuhiro Yoshikawa, 2013 .

Attached-type flexible flow sensor for air conditioning network systems

Mitsuhiro Shikida, Satoshi Iwai, Kazuhiro Yoshikawa, 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

Fabrication of monolithically integrated flow sensor on tube

M. Shikida, T. Yokota, S. Ukai, 2010 .

Fracture toughness measurement of thin-film silicon

M. Shikida, Xueping Li, T. Ando, 2005 .

Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition

Mitsuhiro Shikida, Taeko Ando, T. Kasai, 2005 .

A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching

Kazuo Sato, P. Pal, Kazuo Sato, 2015, Micro and Nano Systems Letters.