Tetsuji Togun

Heteroepitaxial growth of Al2O3 film on Si using dimethylethylamine-alane and O2

M. Ishida, K. Hayama, Tetsuji Togun, 1997 .

Heteroepitaxial growth of Al film on Si using dimethylethylamine-alane

M. Ishida, K. Hayama, Tetsuji Togun, 1997 .