Chisayo Nakayama

New spin on carbon materials made from hemicellulose for hardmask layer

Yuji Tanaka, Masahiko Harumoto, Harold Stokes, 2018, Advanced Lithography.

LWR enhancement for 300mm track processing

Yuji Tanaka, Masahiko Harumoto, Harold Stokes, 2018, Advanced Lithography.

Improved hemicellulose spin on carbon hardmask

Yuji Tanaka, Masahiko Harumoto, Harold Stokes, 2019, Advanced Lithography.