Hideaki Shiotani

Extreme Ultraviolet Resist Development at the University of Hyogo

Takeo Watanabe, H. Kinoshita, Shota Suzuki, 2007 .

Dual Grating Interferometric Lithography for 22-nm Node

P. Naulleau, Takeo Watanabe, H. Kinoshita, 2007, 2007 Digest of papers Microprocesses and Nanotechnology.