Philipp Grunewald

High-resolution EUV microstepper tool for resist testing and technology evaluation

Malcolm C. Gower, A. Brunton, Julian S. Cashmore, 2004, SPIE Advanced Lithography.

High-resolution EUV imaging tools for resist exposure and aerial image monitoring

M. Booth, Julian S. Cashmore, P. Elbourn, 2005, SPIE Advanced Lithography.

Protecting data privacy is key to a smart energy future

Philipp Grunewald, Carissa Véliz, P. Grunewald, 2018, Nature Energy.

High-resolution EUV Microstepper tool for resist testing and technology evaluation

Malcolm C. Gower, A. Brunton, Julian S. Cashmore, 2004, SPIE High-Power Laser Ablation.