Chieh-yu Lin

Detection of focus and spherical aberration by use of a phase grating

Joseph P. Kirk, Scott Schank, Chieh-yu Lin, 2001, SPIE Advanced Lithography.

Contact-reducing method over topography by combining the RELACS technique and bilayer process

Karen Petrillo, Chieh-yu Lin, David M. Dobuzinsky, 2002, SPIE Advanced Lithography.