Y. Aoki

Effects of ion beam irradiation on electrical properties of Langmuir-Blodgett (LB) films

K. Yoshino, J. Kyokane, M. Yoshimizu, 1995, Proceedings of 1995 International Symposium on Electrical Insulating Materials.

Formation of microcrystalline silicon and SiNx films by electron-beam-induced-chemical vapor deposition at ultra low temperature

K. Nakagawa, J. Yamanaka, Tetsuya Sato, 2006 .

Synthesis of Microcrystalline Silicon Films by Low Energy Electron-Beam-Induced Deposition at Cryogenic Temperature

K. Nakagawa, Tetsuya Sato, Y. Aoki, 2004 .

In situ substrate surface cleaning by low‐energy ion bombardment for high quality thin film formation

Tadahiro Ohmi, T. Ohmi, S. Aoyama, 1993 .