G. Lim

Mechanochemical Synthesis of Nano-Sized CeO2 and its Application for CMP Slurry

S. Hyun, Haiwon Lee, Joo Sun Kim, 2004 .

Effects of oxidants on the removal of tungsten in CMP process

S. Hyun, Jong-Ho Lee, H. Lee, 2004 .

Oxidation Behavior of Tungsten in H2O2- and Fe ( NO3 ) 3-Base Aqueous Slurries

Ji-won Son, Jong-Ho Lee, H. Lee, 2006 .