A. Badowski

Impact of the interaction between nitrogen implant and NO anneal on narrow-width transistors

V. Gopinath, A. Kamath, Y. Le, 2003, IEEE Electron Device Letters.

Factors Affecting Thickness Variation of ${\rm SiO}_{2}$ Thin Films Grown by Wet Oxidation

K. Levien, A. Badowski, B. Whitefield, 2011, IEEE Transactions on Semiconductor Manufacturing.