Yin Long

The study and investigation of inline E-beam inspection for 28nm process development

Yin Long, Rongwei Fan, Hunglin Chen, 2017, 2017 China Semiconductor Technology International Conference (CSTIC).

The analysis and reduction of auto focus failure of advanced darkfiled inspection system

Yin Long, Hunglin Chen, Zengyi Yuan, 2015, 2015 China Semiconductor Technology International Conference.

Methodology and Application of the Detection of Invisible Defect by Voltage Contrast Inspection

Kai Wang, Yin Long, Rongwei Fan, 2014 .

The detection and investigation of SRAM data retention soft failures by voltage contrast inspection

Yin Long, Rongwei Fan, Hunglin Chen, 2015, 2015 China Semiconductor Technology International Conference.