L. Barbadillo

Low-energy carbon and nitrogen ion implantation in silicon

J. Piqueras, M. J. Hernández, M. Cervera, 2001 .

Transmission electron microscopy study of simultaneous high-dose C++N+ co-implantation into (1 1 1)Si

J. Piqueras, F. M. Morales, A. Ponce, 2003 .

Structural characterization of high-dose C++N+ ion-implanted (1 1 1) Si

J. Piqueras, F. M. Morales, D. Araújo, 2001 .

Nitrogen incorporation in amorphous SiCN layers prepared from electron cyclotron resonance plasmas

J. Piqueras, M. J. Hernández, L. Barbadillo, 1999 .

Cathodoluminescence from BN buried layers by high-dose ion implantation

J. Piqueras, O. Martinez, M. J. Hernández, 2002 .

Shallow buried SiNx layers

J. Piqueras, M. J. Hernández, M. Cervera, 2000 .