F. Pipia

Strategy in Cleaning Processes for Future Materials

Tadahiro Ohmi, Tadahiro Ohmi, Geun-Min Choi, 2000 .

Quantitative evaluation of bulk-diffused metal contamination by lifetime techniques

F. Priolo, D. Lodi, M. Polignano, 1998 .

Effect of Wet Cleanings on GST Surface: XPS Characterization

S. Spadoni, M. Alessandri, S. Rossini, 2012 .

Analysis of Oxidized Copper Surface and its Evolution

S. Spadoni, M. Alessandri, E. Ravizza, 2012 .

Tungsten Oxidation Kinetic after Wet Cleaning: XPS and ToF-SIMS Characterization

S. Grasso, S. Spadoni, M. Alessandri, 2012 .

Etch Rate Depth Profiling by Single Wafer Etching Equipment

R. Piagge, E. Bellandi, M. Alessandri, 2005 .