Satoru Yamashita

The Degradation Prevention of Resin Materials for Semiconductor Manufacturing Equipment by Applying the Ultra-High Purity Gas Supply Technology

Tadahiro Ohmi, Hidekazu Ishii, Yasuyuki Shirai, 2005 .

Dependence of the Decomposition of Trimethylaluminum on Oxygen Concentration

T. Ohmi, S. Sugawa, Y. Shirai, 2011 .

Syntheses and Characterization of Novel trans‐Bis(phosphoranido)platinum(II) Complexes: Reactions of Lithium Bis(naphth‐1,8‐diyl‐8‐oxy)phosphoranide with cis‐PtCl2(PR3)2 (R = OPh, OMe, Me)

T. Miyamoto, Satoru Yamashita, Kazumasa Kajiyama, 2009 .

Adsorption Behavior of Various Fluorocarbon Gases on Silicon Wafer Surface

T. Ohmi, Y. Shirai, A. Teramoto, 2005 .

Adsorption Behavior of Various Fluorocarbon Gases on Silicon Wafer Surface

Tadahiro Ohmi, Takeyoshi Kato, Yasuyuki Shirai, 2005 .