Bing-Zong Li

A method to improve field alignment registration accuracy in VLSI lithography

Bin Wang, Xiaoping Zhang, Jianhai Liu, 1998, 1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105).

2001 6th International Conference on Solid-State and Integrated-Circuit Technology: Proceedings : October 22-25, 2001, Shanghai, China

Bing-Zong Li, 2002 .

Epitaxial CoSi2 film grown on Si substrate by solid interaction of Co/Ti/Si and TiN/Co/Ti/Si multilayer

Ping Liu, Bing-Zong Li, Wei-Jun Wu, 1994, Thin Film Physics and Applications.

Silicon nitride film formed by NH3 plasma-enhanced thermal nitridation

Bing-Zong Li, Zhi G. Gu, 1991, Thin Film Physics and Applications.

Plasma-enhanced chemical vapor deposition of nitrogen-rich silicon oxynitride thin film for gate insulator application

Wen-Jie Qi, Jing Liu, Bing-Zong Li, 1994, Thin Film Physics and Applications.

Interfacial reaction of bilayer Co/Ti with Si1-xGex epitaxially grown on Si(100)

Wen-Jie Qi, Bing-Zong Li, Ming Zhang, 1994, Thin Film Physics and Applications.

Electromigration performance improvement of Al-Si-Cu/TiN/Ti/n+Si contact

Bing-Zong Li, Gang Qian, Yong Lu, 1998, Thin Film Physics and Applications.

The dependence of the etching property of CoSi2 films in diluted HF solutions on the formation conditions

Bing-Zong Li, Christophe Detavernier, Guo-Ping Ru, 2001 .

Effects of the annealing temperature on Ni silicide/n-Si(100) Schottky contacts

Bing-Zong Li, Guo-Ping Ru, Shiyang Zhu, 2004 .

Solid state reaction of Co,Ti with epitaxially‐grown Si1−xGex film on Si(100) substrate

Wen-Jie Qi, Xiangjiu Zhang, David C. Miller, 1995 .

Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition

Qi Xie, Yu-Long Jiang, Bing-Zong Li, 2008 .