Igor Ivonin

Pupil and illuminator optimization in partially coherent imaging systems

Tor Sandstrom, Igor Ivonin, I. Ivonin, 2006, SPIE Advanced Lithography.

Photonic bandgap quasi-crystals for integrated WDM devices

Holger Schmidt, Leonid Polonskiy, Sergey Babin, 2003, SPIE OPTO.

Pupil optimization of incoherent imaging systems for improved CD linearity

Torbjorn Sandstrom, Igor Ivonin, I. Ivonin, 2005, SPIE Advanced Lithography.

Suppression of lateral modes in wide aperture laser diodes by digital planar holograms

Igor Ivonin, Alexander Koshelev, V. Svetikov, 2011, LASE.

SLM lithography: printing down to k1=0.30 without previous OPC processing

Tor Sandstrom, Igor Ivonin, 2006, SPIE Advanced Lithography.

Digital planar holography and multiplexer/demultiplexer with discrete dispersion

Ernst-Bernhard Kley, Sergey Babin, Leonid Polonskiy, 2003, SPIE ITCom.

High repeatability CD-SEM metrology of disk drive writer and extraction of SWA (Conference Presentation)

Sergey Babin, Narender Rana, Igor Ivonin, 2018 .