L. L. Chapelon

Use of optical metrology techniques for uniformity Control of 3D stacked IC's

P. Bar, D. Le Cunff, M. Tardif, 2014, 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014).

An Overview of Patterned Metal/Dielectric Surface Bonding: Mechanism, Alignment and Characterization

Pierric Gueguen, Rachid Taibi, Laurent Clavelier, 2011 .