G. G. Barna

Automatic problem detection and documentation in a plasma etch reactor

G. G. Barna, 1992 .

MMST manufacturing technology-hardware, sensors, and processes

Maureen A. Hanratty, S. O'Brien, G. G. Barna, 1994 .

Automatic problem detection and documentation in a plasma etch reactor

G. G. Barna, 1990, Ninth IEEE/CHMT International Symposium on Electronic Manufacturing Technology,Competitive Manufacturing for the Next Decade.

APC in the semiconductor industry, history and near term prognosis

G. G. Barna, 1996, IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings.

DRY ETCH PROCESSES AND SENSORS

P. K. Mozumder, Jerry A. Stefani, Steven A. Henck, 1994 .