S. Lamy

Influence of the addition of silicon on the structure and properties of chromium nitride coatings deposited by reactive magnetron sputtering assisted by RF plasmas

C. Coddet, P. Briois, D. Mercs, 2007 .

Structural and Mechanical Properties of (Al,Cr)N and (Al,Cr)SiN Coatings Reactively Sputter Deposited

C. Coddet, P. Briois, P. Steinmann, 2007 .

Challenge of ashing and cleaning on SiOC-H dielectric: characterization and main issues

P. Brun, D. Louis, M. Assous, 2002 .

Characterization of photoresist poisoning induced by a post etch stripping step

O. Louveau, N. Rochat, D. Louis, 2002, Proceedings of the IEEE 2002 International Interconnect Technology Conference (Cat. No.02EX519).