Gilheyun Choi

Implementation of a robust virtual metrology for plasma etching through effective variable selection and recursive update technology

Thomas F. Edgar, Chonghun Han, Han-Ku Cho, 2014 .

An effective procedure for sensor variable selection and utilization in plasma etching for semiconductor manufacturing

Chonghun Han, Thomas F. Edgar, Kiwook Song, 2014, Comput. Chem. Eng..