Praveen Dara

Effect of rapid thermal annealing on the mechanical stress and physico-chemical properties in plasma enhanced atomic layer deposited silicon nitride thin films

J. Meersschaut, A. Peter, Y. Kimura, 2022, Journal of Vacuum Science & Technology B.

Influence of Composition of SiCN as Interfacial Layer on Plasma Activated Direct Bonding

F. Inoue, Andy Miller, G. Beyer, 2019, ECS Journal of Solid State Science and Technology.

Photoanodic oxidation of InP in acid solution and its surface chemistry: On the interplay of photons, protons and hydrodynamics

T. Conard, J. Meersschaut, J. Kelly, 2020 .

Chlorine-Resistant Epoxide-Based Membranes for Sustainable Water Desalination

D. M. Davenport, M. Elimelech, G. Koeckelberghs, 2021, Environmental Science & Technology Letters.