Vivek K. Singh

Relevance of TCAD to process-aware design

Vivek K. Singh, Jorge Garcia-Colevatti, 2002, SPIE Advanced Lithography.

Simulation of profile evolution in silicon reactive ion etching with re‐emission and surface diffusion

Vivek K. Singh, Eric S. G. Shaqfeh, James P. McVittie, 1992 .