Severin Unger

Vibration isolator carrying atomic force microscope’s head

Shingo Ito, Georg Schitter, Severin Unger, 2017 .

Wavefront measurement based feedback control for automatic alignment of a high-NA optical system

Georg Schitter, Shingo Ito, Severin Unger, 2018 .

Flexure design for precision positioning using low-stiffness actuators

Shingo Ito, Francesco Cigarini, Georg Schitter, 2016 .