K. Matsui

Highly Reliable Thin MIM Capacitor on Metal (CoM) Structure with Vertical Scalability for Analog/RF Applications

Y. Hayashi, M. Furumiya, N. Inoue, 2007, 2007 IEEE International Electron Devices Meeting.

Surface Control of Bottom Electrode in Ultra-Thin SiN Metal–Insulator–Metal Decoupling Capacitors for High Speed Processors

Y. Hayashi, M. Furumiya, N. Inoue, 2007 .