S. Ishihara

The Role of Hydrogen Radicals in the Growth of a-Si and Related Alloys

J. Hanna, H. Shirai, S. Oda, 1986 .

Structure of Polycrystalline Silicon Thin Film Fabricated from Fluorinated Precursors by Layer-by-Layer Technique

Isamu Shimizu Isamu Shimizu, S. Ishihara, Deyan He Deyan He, 1994 .

Preparation of High-Quality Microcrystalline Silicon from Fluorinated Precursors by a Layer-by-Layer Technique

D. He, Isamu Shimizu Isamu Shimizu, S. Ishihara, 1993 .

Highly Textured Microcrystalline Si-Thin film Fabricated by Layer-by-Layer Technique

D. He, T. Akasaka, I. Shimizu, 1992 .