A. Usenko

发表

The Study of the Bonding Energy on Silicon-to-Glass Wafer Bonding

T. Chuang, A. Usenko, J. Cites, 2010, ECS Transactions.

Transfer of single crystalline silicon nanolayer onto alien substrate

Bo Chen, W. Carr, A. Usenko, 2004, IEEE Transactions on Nanotechnology.

Layer-transfer process for silicon-on-insulator with improved manufacturability

A. Usenko, 2003 .

Transformation of hydrogen trapped onto microbubbles into H platelet layer in SI

W. Carr, A. Usenko, Bo Chen, 2003 .

Plasma Hydrogenation of a Buried Trap Layer in Silicon : Formation of a Platelet Layer

W. Carr, A. Usenko, Bo Chen, 2002 .

Crystal fracture induced by decorating of postimplantation defects: Silicon layer delamination

W. Carr, A. Usenko, B. B. Bo Chen, 2002, Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on.

Hydrogen Platelet Layer in Silicon Formed from Hydrogen Trapped onto Microbubbles of Gases

W. Carr, A. Usenko, Bo Chen, 2002 .

Characterization of a high-density plasma immersion ion implanter with scaleable ECR large-area plasma source

Gotze H. Popov, Mahmudur Rahman, H. Walitzki, 2005 .

Localized melting induced by rapid annealing correlated with the space distribution of A type microdefects in silicon Czochralski-grown wafers

A. Usenko, 1993 .

Global patterns of azimuthal anisotropy and deformations in the continental mantle

A. Milev, L. Vinnik, L. Makeyeva, 1992 .

Thinner Silicon-on-Insulator Using Plasma Hydrogenation

A. Ulyashin, A. Usenko, 2002 .

Alternative Smart-cut-like process for ultra-thin SOI fabrication

Bo Chen, William N. Carr, Alexander Y. Usenko, 2002, 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259).

Blistering on Silicon Surface Caused by Gettering of Hydrogen on Post-Implantation Defects

W. Carr, A. Usenko, 2001 .

Irradiation-then-anneal processing to improve BSIT performance

A. Usenko, 1994 .

Using electron irradiation to control the turn-off time of static induction transistors

A. Usenko, 1993 .

Hydrogenation of trap layer as an SOI process step

W. N. Carr, A. Y. Usenko, W. Carr, 2000, 2000 IEEE International SOI Conference. Proceedings (Cat. No.00CH37125).