Hiroshi Kubota

发表

Model of coating and drying process for flat polymer film fabrication

Kazuhiro Takeshita, Hiroyuki Kagami, Shinji Kobayashi, 2002, Photomask Japan.

A-11-5 High accuracy positioning of open-loop driving

Yuki Soh, Hiroshi Kubota, Yosuke Iwata, 2009 .

Adaptive friction compensation for a high precision stage using synchronous piezoelectric device driver (産業計測制御研究会計測・センサ応用,モーションコントロール全般)

Tadahiro Ohmi, K. Kosaka, Seiji Hashimoto, 2007 .

Thickness control of a thin film after drying through thermal and evaporative management in drying process of a polymer solution coated on a flat substrate: application of the dynamical model of the drying process

Hiroyuki Kagami, Hiroshi Kubota, 2011, Microtechnologies.

Continuous Path Tracking System of High Precision Stage Using Synchronous Piezoelectric Device Driver

Kiyoshi Ohishi, Tadahiro Ohmi, Truong Ngoc Minh, 2006 .

Development of a multi-electrode system for non-destructive and contactless wafer evaluation

Yuki Soh, Hiroshi Kubota, Justin Ndagijmana, 2013, Smart Materials, Nano-, and Micro- Smart Systems.

A quick inspection of wide area uniformity of resist thickness for flat panel display manufacturing

Yasuhiro Watanabe, Hiroshi Kubota, Akira Nakada, 2005 .

A Control Method of Ultrasonic Actuator-Driven Precision Stages Based on Stick-Slip Compensation and Continuous-Path Tracking

Kiyoshi Ohishi, Tadahiro Ohmi, Takeo Ishikawa, 2005 .

An experiment for developing a micro-crack alert system for large thin mirror

Naruhisa Takato, Masanori Iye, Tomonori Usuda, 2004, SPIE Astronomical Telescopes + Instrumentation.

A Friction Compensation Method in Positioning Control of Nonresonant Ultrasonic Actuator-Driven Precise Stage

Kiyoshi Ohishi, Tadahiro Ohmi, Takeo Ishikawa, 2006 .

Variable Frequency Drive using nonresonant ultrasonic motor for wear reduction

Yuki Soh, Hiroshi Kubota, Koji Kosaka, 2010, 2010 International Symposium on Semiconductor Manufacturing (ISSM).

Accurate Friction Compensation for a High Precision Stage using a Synchronous Piezoelectric Device Driver

Kiyoshi Ohishi, Tadahiro Ohmi, Truong Ngoc Minh, 2007 .

Arbitrary pattern fabrication with a LCD reticle-free exposure method

K. Kosaka, Kazumitsu Nakamura, Tatsuo Morimoto, 2003, Photomask Japan.

1464 Development of The Tile Point Charge Account Method of Construction of The Precast Concrete Structural Element Part4. Result of Heat and Cool Cycling Test

Atsushi Hattori, Haruo Sasaki, Hiroshi Kubota, 2014 .

Development of reticle-free exposure method with LCD projection image

K. Kosaka, Kazumitsu Nakamura, Hiroshi Kubota, 2002, Photomask Japan.

Adaptive Observer Based-Static Friction Compensation of Ultraprecision Stages for Next-Generation Semiconductor Exposure Equipment

Kiyoshi Ohishi, Tadahiro Ohmi, Takeo Ishikawa, 2005 .

High-Density Mounting of Piezoresistive Pressure Sensors Using Reticle Free Exposure Method for Suppressing Fluctuation of Sensitivity

Shigeyuki Matsumoto, Yuki Soh, Naoki Hayashi, 2008 .

Low-harmonic GTO converter for power factor compensation

Hiroshi Kubota, P. Viriya, K. Matuse, 1988, PESC '88 Record., 19th Annual IEEE Power Electronics Specialists Conference.

The Influence of Aperture Exerting on the Legibility of Multiplexed Dot Matrix TN-LCD : Waves, Optics and Quantum Electronics

Shunsuke Kobayashi, Hiroshi Kubota, Cleber Magalhaes Gomes, 1988 .

Development of a multi-flash lamp in pulse photo conductivity method

Hiroshi Kubota, K. Kobayashi, J. Fukashi, 2013, Smart Materials, Nano-, and Micro- Smart Systems.

Applying the dynamical model of drying process of a polymer solution coated on a flat substrate to effects of bumpy substrate

Hiroyuki Kagami, Hiroshi Kubota, 2010, NanoScience + Engineering.

Development of an ultra-precision stage control system using nonresonant ultrasonic motor

Kiyoshi Ohishi, Tadahiro Ohmi, K. Kosaka, 2003, IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468).

615 Fast Motion Control of a High Precision Stage using a Synchronous Piezoelectric Device Driver

Kiyoshi Ohishi, Truong Ngoc Minh, Seiji Hashimoto, 2005 .

Development of nonresonant ultrasonic motor with sub-nanometer resolution

Tadahiro Ohmi, Hiroshi Kubota, Akira Nakada, 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

Slip-free driving method for nonresonant piezoelectric actuator

Hiroyuki Furukawa, Tadahiro Ohmi, K. Kosaka, 2005 .

Operation tests for SN transition superconducting fault current limiter in the power system simulator

Hideyuki Kameda, Teruhisa Kumano, Hiroshi Kubota, 2005 .

Sub-nanometer resolution ultrasonic motor for 300 mm wafer lithography precision stage

Hiroshi Kubota, T. Harada, Akira Nakada, 2001 .

Wear reduction method for frictionally fast feeding piezoactuator

Hiroyuki Furukawa, Tadahiro Ohmi, Seiji Hashimoto, 2006 .

New Method of Measuring Underlying Conductivity in Highly-Insulating Materials, with its Application to Nonlinear Conductivity of TTF-TCNQ

Hiroshi Kubota, Hiroyuki Anzai, Taizo Masumi, 1984 .

Performance verification of a practical fault current limiter using YBCO thin film

H. Taniguchi, Masatoyo Shibuya, Hiroshi Kubota, 2001 .

Improvement of maximum working voltage of resistive fault current limiter using YBCO thin film and metal thin film

Hiroshi Kubota, Kudo Yuki, H. Kubota, 2002 .

Quench Properties and Fault Current Limiters of YBCO Thin-Film Superconductors

Koichi Inoue, Hiroshi Kubota, Mutsuki Yamazaki, 1998 .