S. Suh

发表

Vapor Deposition of Metal Oxides and Silicates: Possible Gate Insulators for Future Microelectronics

R. Gordon, D. Hausmann, J. Becker, 2001 .

A new precursor for the chemical vapor deposition of tantalum nitride films

Yongqiang Wang, P. Heide, D. M. Hoffman, 2004 .

Vapor Deposition of Metal Oxides and Silicates: Possible Gate Insulators for Future Microelectronics.

R. Gordon, D. Hausmann, J. Becker, 2001 .

Synthesis of ethyl zinc fluoroalkoxide complexes and the crystal structure of [EtZn(py){μ-OCH(CF3)2}]2

S. Javed, D. M. Hoffman, S. Suh, 2008 .

Chemical Vapor Deposition of Cerium Oxide Films from a Cerium Alkoxide Precursor

J. Guan, D. M. Hoffman, Jean-Sébastien M. Lehn, 2004 .

Synthesis and Structures of Gallium Alkylthiolate Compounds

T. A. Albright, J. Hardesty, D. M. Hoffman, 1999 .

Synthesis and Structural Characterization of Tantalum(IV) Amido Compounds.

D. M. Hoffman, S. Suh, 1996, Inorganic chemistry.

SYNTHESIS OF TIN OXIDE PRECURSORS AND RELATED GERMANIUM AND LEAD COMPOUNDS

D. M. Hoffman, S. Suh, 1996 .

Atmospheric pressure chemical vapor deposition of undoped zinc oxide films from a zinc amide precursor

W. Chu, D. M. Hoffman, Z. Zhang, 2001 .

Indium Fluoroalkoxide Compounds.

D. M. Hoffman, S. Suh, L. Mîinea, 1999, Inorganic chemistry.

Synthesis of aluminium and gallium fluoroalkoxide compounds and the low pressure metal-organic chemical vapor deposition of gallium oxide films

Jiarui Liu, W. Chu, S. Bott, 1999 .

Electron beam lithography process using radiation sensitive carboxylate metalorganic precursors

C. Henderson, S. Suh, P. Roman, 2003 .

Hybrid bilayer imaging approach using single component metal-organic precursors for high-resolution electron beam lithography

Clifford L. Henderson, Paul J. Roman, Augustin Jeyakumar, 2003, SPIE Advanced Lithography.

Atmospheric-pressure chemical vapor deposition of fluorine-doped tin oxide thin films

W. Chu, Zuhua Zhang, D. M. Hoffman, 1999 .

Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten

Y. J. Kim, R. Gordon, Byung-Teak Lee, 2003 .

Chemical vapor deposition of gallium sulfide thin films

D. M. Hoffman, S. Suh, 2000 .

Chemical Vapor Deposition of Gallium Sulfide Thin Films.

D. M. Hoffman, S. Suh, 2001 .

Highly Conformal Thin Films of Tungsten Nitride Prepared by Atomic Layer Deposition from a Novel Precursor

R. Gordon, Sheng-Chang Wang, J. Becker, 2003 .

Syntheses and crystal structures of tantalum(IV) amido and imido halide complexes

D. M. Hoffman, S. Suh, 1993 .