Boaz Brill

发表

LER detection using dark field spectroscopic reflectometry

Benjamin Bunday, Shahar Gov, Boaz Brill, 2010, Advanced Lithography.

Alternative approach for direct APC using scatterometry data

Yoel Cohen, Boaz Brill, Igor Turovets, 2002, SPIE Advanced Lithography.

Development and performance of a 320 x 256 quantum well infrared photodector camera

Boaz Brill, Gabby Sarusi, 1998, Optics & Photonics.

A holistic metrology approach: multi-channel scatterometry for complex applications

Alok Vaid, Cornel Bozdog, Susan Emans, 2011, Advanced Lithography.

Holistic metrology approach: hybrid metrology utilizing scatterometry, critical dimension-atomic force microscope and critical dimension-scanning electron microscope

Peter Ebersbach, Charles N. Archie, Alok Vaid, 2011 .

System considerations in the design of QWIP-based thermal imagers

Boaz Brill, Gabby Sarusi, 1998, Optics & Photonics.

Product-driven material characterization for improved scatterometry time-to-solution

Carsten Hartig, Alok Vaid, Cornel Bozdog, 2009, Advanced Lithography.

QWIP research and development of 320 x 256 QWIP arrays in ElOp

Boaz Brill, Gabby Sarusi, 1997, Defense, Security, and Sensing.

A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM

Peter Ebersbach, Alok Vaid, Cornel Bozdog, 2011, Advanced Lithography.