Ushasree Katakamsetty
发表
Yang Qing,
Quek Shyue Fong,
Sky Yeo,
2014,
Advanced Lithography.
Xiang Hua,
Song Li,
Vikas Mehrotra,
2009,
Advanced Lithography.
Topography hotspot-aware process control metrology cell insertion: DFM: Design for manufacturability
Ushasree Katakamsetty,
Gazi Huda,
Vikas Mehrotra,
2018,
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).