Mikihiko Ishii

Double-grating lateral shearing interferometer for EUV optics at-wavelength measurement

Masanobu Hasegawa, Akiyoshi Suzuki, Katsuhiko Murakami, 2005, SPIE Advanced Lithography.

Comparisons between EUV at-wavelength metrological methods

Masanobu Hasegawa, Akiyoshi Suzuki, Mitsuo Takeda, 2005, SPIE Optics + Photonics.

Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes

Kazuya Ota, Masanobu Hasegawa, Akiyoshi Suzuki, 2003, SPIE Advanced Lithography.

Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL

Katsuhiko Murakami, Shigeru Nakayama, Mikihiko Ishii, 2004, SPIE Optics + Photonics.

Experimental comparison of absolute PDI and lateral shearing interferometer

Masanobu Hasegawa, Akiyoshi Suzuki, Katsuhiko Murakami, 2005, SPIE Advanced Lithography.