Paul A. Warkentin

Mask Specs And Equipment Specs - Disparity And Reconciliation

Paul A. Warkentin, James A. Schoeffel, Ric Diola, 1986, Advanced Lithography.

Improved rasterization system

Michael Rieger, Paul A. Warkentin, Matthew J. Jolley, 1988 .

Method for forming high address resolution print pattern

Michael Rieger, Paul A. Warkentin, Matthew J. Jolley, 1989 .

Scanning Laser Technology Applied to High Speed Reticle Writing

Paul A. Warkentin, James A. Schoeffel, 1986, Advanced Lithography.

Image Quality Enhancements For Raster Scan Lithography

Michael Rieger, Paul A. Warkentin, James A. Schoeffel, 1988, Advanced Lithography.

A Comparison of Optical Gaussian Beam Lithography with Conventional E-beam and Optical Lithography

Paul C. Allen, Paul A. Warkentin, 1989, Advanced Lithography.